Journal article
Effective removal of metal-carbide contamination from diamond circuit boards by reactive ion etching
K Edalati, S Higham, SE De Leon, SLC Au, A Nadarajah, S Prawer, DJ Garrett
Diamond and Related Materials | ELSEVIER SCIENCE SA | Published : 2023
Abstract
Recently, we have demonstrated the feasibility of using laser-patterned polycrystalline diamond sheets as a substrate for implantable circuit boards. The laser grooves in the diamond can be filled with biocompatible braze alloys such as Au-ABA and polished back to create long-lasting, hermetic circuit boards suitable for implantation in the human body. However, during the process of depositing molybdenum and niobium layers to aid adhesion of the Au-ABA braze, a residual film was found to form, which was resistant to both polishing and chemical etching, resulting in electrical shorting between features on the circuit board. Here, we report an optimised reactive ion etching process to remove t..
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Grants
Awarded by Australian Research Council
Funding Acknowledgements
Carbon Cybernetics received grant funding from MTPConnect as part of the Australian Government's $45 million BioMedTech Horizons program, an MRFF initiative. This work was performed in part at the Melbourne Centre for Nanofabrication (MCN) in the Victorian Node of the Australian National Fabrication Facility (ANFF) . KE is supported by a University of Melbourne doctoral scholarship. This research was funded by Linkage Grants from Australian Research Council (ARC, LP180100638 and LP190100528) in collaboration with Carbon Cybernetics Pty Ltd. DJG is support by an ARC Future Fellowship (FT190100215) . SP, SLCA and DJG are shareholders of Carbon Cybernetics Pty Ltd., a company developing a diamond and carbon-based medical device for epilepsy management. The other authors declare no conflict of interest.